XGZF9304 Gas Flow Sensor Die

Thermodynamic Principle
MEMS Technology
High Sensitivity, especially for low flow
Low offset Drift and High Response
Resistant to vibration, pressure and thermal shock

Description
SAFETY NOTES & WARRANTY

Description

APPLICATIONS

Ventilator,Oxygen Generator, CPAP Device, Anesthesia, Critical care equipment etc,.
HVAC, Air purifier, Environmental monitoring etc,.
Fuel cell control and more air flow control and measurement

INTRODUCTION

XGZF9304 flow sensing chip is a thermodynamically based measurement of gas flow through the surface of the chip. All pads are pulled to one side for ease of packaging. In addition a low heat source resistor is used so that it can operate at voltages as low as 5V, so the chip has low power consumption. The sensitive area of the chip consists of a heating resistor and two sets of thermopiles. The thermopiles are distributed at the two ends of the heating resistor as upstream and downstream, when a gas flows through, the upstream heat is taken away and cooled, and the downstream is heated up by heat delivery, and the heat distribution is no longer symmetrical, and the difference between the output voltage of the upstream and downstream thermopiles is used as the output of the sensor, which improves the measurement accuracy and reduces the error.

Compared with traditional MEMS flow sensors, XGZF9304 has two key advantages. The first is the replacement of the thermistor with a thermopile temperature measurement element of special structural design, which can realize ultra-low noise signal, improve measurement accuracy and simplify peripheral circuit. Secondly, traditional MEMS flow sensing chips use probes to measure, it is easy to destroy the original flow field, so that the measurement accuracy is reduced, while the XGZF9304 can be placed in the manifold, reducing the chance of contamination of the chip surface.

DIMENSION (Unit:mm)

9304 DIMENSION

More information about XGZF9304 gas flow sensor die, refer to Datasheet or contact CFSensor

XGZF9304 Gas Flow Sensor Die V1.0.PDF

SAFETY NOTES & WARRANTY

SAFETY NOTES

Using these sensors products may malfunction due to external interference and surges, therefore, please confirm the performance and quality in actual use. Just in case, please make a safety design on the device (fuse, circuit breaker, such as the installation of protection circuits, multiple devices, etc.), so it would not harm life, body, property, etc even a malfunction occurs. To prevent injuries and accidents, please be sure to observe the following items:

The driving current and voltage should be used below the rated value.
Please follow the terminal connection diagram for wiring. Especially for the reverse connection of the power supply, it will cause an accident due to circuit damage such as heat, smoke, fire, etc.
In order to ensure safety, especially for important uses, please be sure to consider double safety circuit configuration.
Do not apply pressure above the maximum applied pressure. In addition, please be careful not to mix foreign matter into the pressure medium. Otherwise, the sensor will be discarded, or the media will blew out and cause an accident.
Be careful when fixing the product and connecting the pressure inlet. Otherwise, accidents may occur due to sensor scattering and the blowing out of the media.
If the sensor come with sharp PIN, please be careful not to hurt your body when using it.

WARRANTY

The information in this sheet has been carefully reviewed and is believed to be accurate; however, no responsibility is assumed for inaccuracies. Furthermore, this information does not convey to the purchaser of such devices any license under the patent rights to the manufacturer. CFSensor reserves the right to make changes without further notice to any product herein.

CFSensor makes no warranty, representation or guarantee regarding the suitability of its product for any particular purpose, nor does CFSensor assume any liability arising out of the application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different applications. All operating parameters must be validated for each customer application by customer’s technical experts. CFSensor does not convey any license under its patent rights nor the rights of others.